Stacked microelectronic assemby with tsvs formed in stages and carrier above chip

ABSTRACT

A microelectronic assembly is provided which includes a first element consisting essentially of at least one of semiconductor or inorganic dielectric material having a surface facing and attached to a major surface of a microelectronic element at which a plurality of conductive pads are exposed, the microelectronic element having active semiconductor devices therein. A first opening extends from an exposed surface of the first element towards the surface attached to the microelectronic element, and a second opening extends from the first opening to a first one of the conductive pads, wherein where the first and second openings meet, interior surfaces of the first and second openings extend at different angles relative to the major surface of the microelectronic element. A conductive element extends within the first and second openings and contacts the at least one conductive pad.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of the filing date of U.S.Provisional Patent Application No. 61/419,033 filed Dec. 2, 2010, thedisclosure of which is hereby incorporated herein by reference.

BACKGROUND OF THE INVENTION

The present invention relates to packaging of microelectronic devices,especially the packaging of semiconductor devices.

Microelectronic devices generally comprise a thin slab of asemiconductor material, such as silicon or gallium arsenide, commonlycalled a die or a semiconductor chip. Semiconductor chips are commonlyprovided as individual, prepackaged units. In some unit designs, thesemiconductor chip is mounted to a substrate or chip carrier, which isin turn mounted on a circuit panel, such as a printed circuit board.

The active circuitry is fabricated in a first face of the semiconductorchip (e.g., a front surface). To facilitate electrical connection to theactive circuitry, the chip is provided with bond pads on the same face.The bond pads are typically placed in a regular array either around theedges of the die or, for many memory devices, in the die center. Thebond pads are generally made of a conductive metal, such as copper, oraluminum, around 0.5 micron (μm) thick. The bond pads could include asingle layer or multiple layers of metal. The size of the bond pads willvary with the device type but will typically measure tens to hundreds ofmicrons on a side.

Through-silicon vias (TSVs) can be used to provide electricalconnections between the front surface of a semiconductor chip on whichbond pads are disposed, and a rear surface of a semiconductor chipopposite the front surface. Conventional TSV holes may reduce theportion of the first face that can be used to contain the activecircuitry. Such a reduction in the available space on the first facethat can be used for active circuitry may increase the amount of siliconrequired to produce each semiconductor chip, thereby potentiallyincreasing the cost of each chip.

Size is a significant consideration in any physical arrangement ofchips. The demand for more compact physical arrangements of chips hasbecome even more intense with the rapid progress of portable electronicdevices. Merely by way of example, devices commonly referred to as“smart phones” integrate the functions of a cellular telephone withpowerful data processors, memory and ancillary devices such as globalpositioning system receivers, electronic cameras, and local area networkconnections along with high-resolution displays and associated imageprocessing chips. Such devices can provide capabilities such as fullinternet connectivity, entertainment including full-resolution video,navigation, electronic banking and more, all in a pocket-size device.Complex portable devices require packing numerous chips into a smallspace. Moreover, some of the chips have many input and outputconnections, commonly referred to as “I/O's.” These I/O's must beinterconnected with the I/O's of other chips. The interconnectionsshould be short and should have low impedance to minimize signalpropagation delays. The components which form the interconnectionsshould not greatly increase the size of the assembly. Similar needsarise in other applications as, for example, in data servers such asthose used in internet search engines. For example, structures whichprovide numerous short, low-impedance interconnects between complexchips can increase the bandwidth of the search engine and reduce itspower consumption.

Despite the advances that have been made in semiconductor via formationand interconnection, further improvements can be made to enhance theprocesses for making connections between front and rear chip surfaces,and to the structures which can result from such processes.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view illustrating a microelectronic packageaccording to an embodiment of the invention, as attached to a circuitpanel.

FIG. 1A is a fragmentary sectional view further illustrating themicroelectronic package shown in FIG. 1.

FIG. 2 is a fragmentary sectional view particularly illustrating amicroelectronic assembly in accordance with the microelectronic packageof FIG. 1.

FIG. 3 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 1.

FIG. 3A is a sectional view illustrating a microelectronic packageaccording to a variation of the embodiment shown in FIG. 1.

FIG. 4 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 3.

FIG. 5 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 3.

FIGS. 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, and 16 are fragmentarysectional views illustrating stages in a method of fabricating amicroelectronic assembly according to an embodiment of the invention.

FIG. 17 is a fragmentary sectional view illustrating a microelectronicassembly in accordance with a variation of the embodiment of theinvention shown in FIG. 3.

FIG. 18 is a fragmentary sectional view illustrating a microelectronicassembly in accordance with a variation of the embodiment of theinvention shown in FIG. 17.

FIG. 19 is a fragmentary sectional view illustrating a microelectronicassembly in accordance with a variation of the embodiment of theinvention shown in FIG. 17.

FIG. 20 is a fragmentary sectional view illustrating a microelectronicassembly in accordance with a variation of the embodiment of theinvention shown in FIG. 19.

FIG. 21 is a fragmentary sectional view illustrating a microelectronicassembly in accordance with a variation of the embodiment of theinvention shown in FIG. 3.

FIGS. 22, 23, 24, 25, 26, 27, 28, 29, 30, 31 and 32 are fragmentarysectional views illustrating stages in a method of fabricating amicroelectronic assembly shown in FIG. 21, according to an embodiment ofthe invention.

FIGS. 33, 34, and 35 are fragmentary sectional views illustrating stagesin a method of fabricating a microelectronic assembly according to avariation of the embodiment shown in FIG. 21.

FIGS. 36 and 37 are fragmentary sectional views illustrating stages in amethod of fabricating a microelectronic assembly according to avariation of the embodiment shown in FIG. 21.

FIG. 38 is a sectional view illustrating a microelectronic packagepositioned above a circuit panel to be joined therewith, in a variationof the embodiment shown in FIG. 3A.

FIG. 39 is a sectional view illustrating a microelectronic assemblyaccording to a variation of the embodiment shown in FIG. 21.

FIG. 40 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 39.

FIG. 41 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 21.

FIG. 42 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 41.

FIG. 43 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 42.

FIG. 44 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 43.

FIG. 45 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiment shown in FIG. 2.

FIG. 46 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 45and FIG. 3.

FIG. 47 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 46.

FIG. 48 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 47.

FIG. 49 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 48.

FIG. 50 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 49.

FIG. 51 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 18.

FIGS. 52 and 53 are fragmentary sectional views illustrating amicroelectronic assembly according to a variation of the embodimentsshown in FIG. 46.

FIGS. 54, 55, 56, 57, 58, 59, 60, 61, and 62 are fragmentary sectionalviews illustrating stages in a method of fabricating a microelectronicassembly shown in FIG. 45, according to an embodiment of the invention.

FIG. 63 is a fragmentary sectional view illustrating a microelectronicassembly according to a variation of the embodiments shown in FIG. 62.

FIG. 64 FIG. 23 is a schematic depiction of a system according to oneembodiment of the invention.

DETAILED DESCRIPTION

FIG. 1 illustrates a microelectronic package 100 in accordance with anembodiment of the invention. The microelectronic package includes amicroelectronic element 102, e.g., an integrated circuit embodied in asemiconductor chip, which can include silicon, an alloy of silicon, orother semiconductor material such as a III-V semiconductor material orII-VI semiconductor material. As seen in the enlarged view of FIG. 1A,the chip 102 has a front face 104, also referred to as a contact-bearingface, being a major surface of the chip, with a dielectric layer 105 ofthe chip exposed at the front face. The dielectric layer 105 overlies asemiconductor region 107 of the chip in which active semiconductordevices, e.g., transistors, diodes, or other active devices areprovided. As further seen in FIG. 1, a plurality of conductive pads 106are exposed at the front face 104.

In a particular embodiment, the dielectric layer 105 can include one ormore layers of dielectric material having a low dielectric constant,i.e., a “low-k” dielectric layer, between and around the metal wiringpatterns which provide electrical interconnection for themicroelectronic element. Low-k dielectric materials include poroussilicon dioxide, carbon-doped silicon dioxide, polymeric dielectrics,and porous polymeric dielectrics, among others. In a porous low-kdielectric layer, the dielectric layer can have substantial porosity,which reduces the dielectric constant of the dielectric materialrelative to a nonporous layer of the same material. Dielectric materialstypically have a dielectric constant significantly above 1.0, but airwhich occupies open spaces within a porous dielectric material has adielectric constant of about 1.0. In this way, some dielectric materialscan achieve reductions in the dielectric constant by having substantialporosity.

However, some low-k dielectric materials, such as polymeric dielectricmaterials and porous dielectric materials, withstand much lessmechanical stress than traditional dielectric materials. Particulartypes of operating environments and ways that the microelectronicelement may be tested can present stress at or near a limit that thelow-k dielectric material can tolerate. The microelectronic assembliesdescribed herein provide improved protection for the low-k dielectriclayer of a microelectronic element by moving the locations where stressis applied to the microelectronic element away from the low-k dielectriclayer 105. In this way, manufacturing, operation and testing can applymuch reduced stresses to the low-k dielectric layer, thus protecting thelow-k dielectric layer. As further seen in FIG. 1, a surface 103 of afirst element 110 is bonded to the front face 104 with a dielectricmaterial 108 such as an adhesive. Other possible bonding materials caninclude glass, which in a particular embodiment, can be doped and canhave a glass transition temperature below 500° C. The first element canconsist essentially of semiconductor material or an inorganic dielectricmaterial or other material having a coefficient of thermal expansion(“CTE”) of less than 10 parts per million (“ppm”) per degree Celsius:i.e. less than 10 ppm/° C. Typically, the first element 110 consistsessentially of the same semiconductor material as the chip or consistsessentially of dielectric material which has a CTE at or close to theCTE of the chip. In such case, the first element can be said to be“CTE-matched” with the chip. As further seen in FIG. 1, the firstelement 110 can have a plurality of “staged vias” for providingelectrically conductive connections with the conductive pads 106 of thechip. For example, the first element can have a plurality of firstopenings 111 which extend from an exposed outwardly-facing surface 118towards the chip front surface 104. A plurality of second openings 113can extend from respective first openings 111 to respective conductivepads 106 of the chip. As further seen in FIG. 1A, at locations where thefirst and second openings meet, interior surfaces 121, 123 of the firstand second openings extend at different angles 140, 142 relative to aplane defined by the major surface 104, which is the same as the angles140, 142 relative to any plane 125 parallel to the major surface.

A plurality of conductive elements 114 extend within the first andsecond openings and are electrically coupled to the conductive pads 106.The conductive elements 114 are exposed at an exposed outwardly-facingsurface 118 of the first element. In one example, the conductiveelements 114 can include metal features which are formed by depositing ametal in contact with exposed surfaces of the conductive pads 106.Various metal deposition steps can be used to form the conductiveelements, as described in further detail below. The first element caninclude one or more passive circuit elements, e.g., capacitors,resistors or inductors, or a combination thereof, which while notspecifically shown in FIG. 1, can further contribute to the function ofthe chip and package 100.

As further provided by the package 100, the first element can functionas a carrier which mechanically supports the chip. The thickness 112 ofthe chip typically is less than or equal to the thickness 116 of thefirst element. When the first element and the chip are CTE-matched andthe first element is bonded to the front face of the chip, the chip canbe relatively thin in comparison to the first element. For example, whenthe first element has a CTE that matches the chip, the thickness 112 ofthe chip may be only a few microns, because stresses applied to theconductive elements 114 are spread over the dimensions and thickness 116of the first element, rather than being applied directly to theconductive pads 106. For example, in a particular embodiment, thethickness 120 of the semiconductor region 107 of the chip may be lessthan one micron to a few microns. The chip, the first element bondedthereto, and the conductive elements 114 together provided amicroelectronic assembly 122 which can be mounted and furtherinterconnected in a microelectronic package.

As further seen in FIG. 1, the conductive elements 114 can beconductively bonded, similar to flip-chip manner, to contacts 124 of adielectric element 126, such as through masses 128 of a bond metal,e.g., solder, tin, indium, or a combination thereof. In turn, thedielectric element can have a plurality of terminals 130 for furtherelectrically connecting the package 100 to corresponding contacts 136 ofa circuit panel 134, such as through conductive masses 132, e.g., solderballs, projecting away from the dielectric element 126.

FIG. 2 is a partial sectional view further illustrating a structure ofthe microelectronic assembly 122. When the first element is made ofsemiconductor material, a dielectric layer 138 can be provided as acoating which may conform to contours of the interior surfaces 121, 123of the first and second openings 111, 113. In one example, when thefirst element consists essentially of semiconductor material, suchconformal dielectric layer 138 can be formed selectively byelectrophoretic deposition on interior surfaces of the openings 111,113, and on an exposed surface 148 of the first element, as will bedescribed in further detail below. A conductive layer 114A canthereafter be formed within the openings, e.g., such as by depositing ametal or a conductive compound of a metal in contact with the conductivepad 106 and the dielectric layer 138. Thereafter, the volume remainingwithin the openings 111, 113 after forming the conductive layer can befilled with a dielectric material 150. A conductive contact 114B thencan be formed atop the dielectric material 150 by subsequentlydepositing a conductive material, e.g., a metal over the dielectricmaterial 150.

FIG. 3 illustrates a variation of the embodiment shown in FIG. 2. Inthis variation, a second conductive element 154 is electrically coupledto the conductive pad 106 and is exposed at a major surface 152 of thechip, specifically a rear surface of the chip that is remote from thefront surface 104. An opening 153 can extend from the rear surface 152of the chip and expose at least a portion of the conductive pad 106. Adielectric layer 158 can line the opening 153 in the chip andelectrically insulate the second conductive element 154 from thesemiconductor region 107 of the chip. In the particular embodiment shownin FIG. 3, the dielectric layer 158 can conform to a contour of aninterior surface 159 of the semiconductor region exposed within theopening 153. Moreover, like the conductive element 114, the secondconductive element can include a conductive layer 154A extending alongthe dielectric layer 158, which can also conform to a contour of theinterior surface 159 of the semiconductor region within the opening 153.As particularly shown in FIG. 3, similar to the first conductive contact114 described above (FIG. 2), dielectric material 160 can be depositedover the conductive layer 154A and an exterior conductive contact 154Bcan be provided which overlies the dielectric material. As shown in FIG.3, the second conductive contact 154B may overlie at least a portion ofthe conductive pad 106 to which it is directly or indirectlyelectrically coupled. As further seen in FIG. 3, interior surfaces 123,159 of the openings in the packaging layer and the wafer have contoursto which dielectric layers 138, 158 conform, and conductive layers 114A,154A conform. The interior surfaces 123, 159, can extend atsubstantially different angles 162, 163 away from the front or majorsurface of the wafer, respectively. As a result, the widths 190, 192 ofthe openings 113, 153 where the conductive layers 114A, 154A meet theconductive pad can be smaller than the widths 191, 193 of the openings113, 153, respectively, at substantial distances in respectivedirections 181, 183 from the conductive pad 106. In a particularembodiment, the openings 113, 153 may have their smallest widths 190,192 where the openings meet the respective surfaces of the conductivepad 106.

As will be further understood, the second conductive elements 154B areexposed at a surface of the wafer 200 and can be available for formingelectrically conductive interconnections between the microelectronicassembly (FIG. 3) and a component external to the microelectronicassembly. For example, as further seen in FIG. 3A, some conductive pads106A of a chip 102 of the microelectronic assembly can have conductiveelements 154 exposed at the rear surface of the chip and be electricallyinterconnected by a bond metal 155, e.g., solder, with conductivefeatures 194 such as conductive pads, on a second dielectric element196. The dielectric element 196 may further include other features suchas conductive traces 198 which can be electrically connected with thepads. As further seen in FIG. 3A, others 106B of the conductive pads maynot have conductive elements 154 connected thereto and exposed at a rearsurface of the chip 102.

FIG. 4 illustrates a further variation in which the second conductiveelement 164 is provided as a solid conductive structure. In this case,the second conductive element 164 at least substantially fills a volumewithin the opening in the chip that remains after forming the conformaldielectric coating 158. As further seen in FIG. 4, a conductive contactor pad portion 164B of the second conductive element can extend beyondthe opening 153 along the rear surface 152 of the chip.

FIG. 5 illustrates yet another variation in which the second conductiveelement includes a conductive layer 166 extending along the dielectriclayer 158. As in the above-described embodiment, the dielectric layer158 and the conductive layer 166 may conform to a contour of theinterior surface 159 of the opening. As further shown in FIG. 5, aconductive mass 168, which can be a bond metal, e.g., solder, tin,indium, or a combination thereof, may be joined to the conductive layer.The conductive mass 168 may at least substantially fill the opening and,as shown in FIG. 5, may project beyond the rear surface 152 of the chip.

Referring to FIG. 6, a method of fabricating a microelectronic assemblyin accordance with any of the above-described embodiments will now bedescribed. As seen in FIG. 6, a semiconductor wafer 200 or portion of awafer can include a plurality of semiconductor chips 102 which areattached together at dicing lanes 201. Each chip typically has aplurality of conductive pads 106 exposed at a front face 104 of thechip. As seen in FIG. 7, a packaging layer 110 such as an unpatternedsemiconductor wafer or glass wafer or other element having a CTE of lessthan 10 ppm/° C. is bonded to the front face 104, such as through anadhesive 108 or other dielectric bonding material such as a doped glasshaving a relatively low melting temperature, such as a temperature below500° C. The packaging layer 110 typically has a CTE which is close to orequal that of the semiconductor wafer 200. For example, when thesemiconductor wafer 200 consists essentially of silicon, the packaginglayer 110 can consist essentially of silicon to be CTE-matched with thewafer 200. Alternatively, a packaging layer 110 of doped glass can beCTE-matched with the semiconductor wafer 200. In a particularembodiment, when the packaging layer 110 is CTE-matched with the wafer200, the dielectric bonding material can also be CTE-matched with thewafer 200.

After bonding the packaging layer 110 to the wafer 200, a thickness ofthe packaging layer 110 can be reduced from an original thickness to areduced thickness 116, as shown in FIG. 8. The packaging layer 110 canbe reduced in thickness by a process of grinding, lapping or polishing,or combination thereof. In one embodiment, the reduced thickness 116that is reached during this process can be a final thickness of thepackaging layer 110.

Hereinafter, a series of fragmentary sectional views are used toillustrate stages in a method of fabricating a microelectronic assemblyaccording to an embodiment of the invention. The steps shown therein maytypically be performed at wafer-level, i.e., prior to severing asemiconductor wafer (FIG. 6) into individual chips 102, although in eachfigure, only a portion of an individual chip may appear. The followingdescription of a method of fabricating the microelectronic assemblyshould be understood to cover either chip-level or wafer-levelfabrication techniques, whether or not the same is specificallydescribed, and whether or not the following description makes referenceto processes performed with respect to a wafer, or to a chip.

FIG. 9 illustrates a stage of fabrication subsequent to the stageillustrated in FIG. 8. As shown therein, an opening 170 is formed whichextends from an exterior surface 148 of the packaging layer 110 to asurface 108A of the dielectric bonding layer 108 overlying a conductivepad 106. The opening 170 can be formed in a staged manner as a firstopening 111 extending from the exposed surface 148 of the packaginglayer 110 towards the chip front surface 104, and a second opening 113extending from the first opening further towards the chip front surface104. In one embodiment, the first and second openings 111, 113 can beformed by forming the first opening such as through etching, laserablation, or by “sand-blasting”, i.e., by directing a stream ofmicro-abrasive particles toward the packaging layer. Thereafter, theprocess can further include forming a dielectric layer (not shown)lining an interior surface of the first opening 111, forming a hole insuch dielectric layer, and then forming the second opening 113 byetching the packaging layer through the hole until a surface of thebonding layer 108 is exposed. When etching the packaging layer 110 toform the second opening, the dielectric layer in the first opening canfunction as a mask such that the packaging layer is etched where exposedwithin the hole in the dielectric layer and the dielectric layerprotects portions of the packaging layer away from the hole from beingetched. Thereafter, as illustrated in FIG. 10, a portion of the bondinglayer 108 exposed within the second opening 113 and overlying theconductive pad 106 is removed so as to expose at least a portion of anupper surface 172 of the pad which faces outwardly away from the chip102.

The process of forming the first and second openings can be as generallydescribed in any or all of United States Patent Publication No.20080246136A1, or United States applications, each filed Jul. 23, 2010:application Ser. Nos. 12/842,717, 12/842,612, 12/842,669; 12/842,692;12/842,587, the disclosures of which are incorporated herein byreference, with the exception that the first and second openings extendthrough a packaging layer and a bonding layer rather than through thechip, and the second opening exposes a portion of an outwardly-facingupper surface of a conductive pad rather than the lower pad surface.

As further seen in FIG. 11, a dielectric layer 138 can be formed whichextends along interior surfaces 121 and 123 of the first and secondopenings, respectively, and overlying an outwardly-facing surface 148 ofthe packaging layer 110. In one example, an electrophoretic depositiontechnique can be used to form a dielectric coating 138 conformally withrespect to the interior surfaces 121, 123 of the openings and thepackaging layer surface 148. In this way, the conformal dielectriccoating may be deposited only onto exposed conductive and semiconductivesurfaces of the assembly. During deposition, the semiconductor devicewafer is held at a desired electric potential and an electrode isimmersed into the bath to hold the bath at a different desiredpotential. The assembly is then held in the bath under appropriateconditions for a sufficient time to form an electrodeposited conformaldielectric layer 138 on exposed surfaces of the device wafer which areconductive or semiconductive, including but not limited to along theoutwardly-facing surface 148, the interior surface 121 of the firstopening 111, and the interior surface 123 of the second opening 113.Electrophoretic deposition occurs so long as a sufficiently strongelectric field is maintained between the surface to be coated therebyand the bath. As the electrophoretically deposited coating isself-limiting in that after it reaches a certain thickness governed byparameters, e.g., voltage, concentration, etc. of its deposition,deposition stops.

Electrophoretic deposition forms a continuous and uniformly thickconformal coating on conductive and/or semiconductive exterior surfacesof the assembly. In addition, the electrophoretic coating can bedeposited so that it does not form on the surface 108A of the dielectricbonding layer 108 overlying the upper surface 172 of the conductive pad106, due to its dielectric (nonconductive) property. Stated another way,a property of electrophoretic deposition is that is does not form on alayer of dielectric material overlying a conductor provided that thelayer of dielectric material has sufficient thickness, given itsdielectric properties. Typically, electrophoretic deposition will notoccur on dielectric layers having thicknesses greater than about 10microns to a few tens of microns. The conformal dielectric layer 138 canbe formed from a cathodic epoxy deposition precursor. Alternatively, apolyurethane or acrylic deposition precursor could be used. A variety ofelectrophoretic coating precursor compositions and sources of supply arelisted in Table 1 below.

TABLE 1 ECOAT NAME POWERCRON 645 POWERCRON 648 CATHOGUARD 325MANUFACTURERS MFG PPG PPG BASF TYPE CATHODIC CATHODIC CATHODIC POLYMERBASE EPOXY EPOXY EPOXY LOCATION Pittsburgh, PA Pittsburgh, PASouthfield, MI APPLICATION DATA Pb/Pf-free Pb-free Pb or Pf-free Pb-freeHAPs, g/L 60-84 COMPLIANT VOC, g/L (MINUS WATER) 60-84 <95 CURE 20min/175 C. 20 min/175 C. FILM PROPERTIES COLOR Black Black BlackTHICKNESS, μm 10-35 10-38 13-36 PENCIL HARDNESS 2H+ 4H BATHCHARACTERISTICS SOLIDS, % wt. 20 (18-22)  20 (19-21)  17.0-21.0 pH (25C.) 5.9 (5.8-6.2) 5.8 (5.6-5.9) 5.4-6.0 CONDUCTIVITY (25 C.) μS1000-1500 1200-1500 1000-1700 P/B RATIO 0.12-0.14 0.12-0.16 0.15-0.20OPERATION TEMP., C. 30-34 34 29-35 TIME, sec 120-180  60-180  120+ ANODESS316 SS316 SS316 VOLTS 200-400 >100  ECOAT NAME ELECTROLAC LECTRASEALDV494 LECTROBASE 101 MANUFACTURERS MFG MACDERMID LVH COATINGS LVHCOATINGS TYPE CATHODIC ANODIC CATHODIC POLYMER BASE POLYURETHANEURETHANE URETHANE LOCATION Waterbury, CT Birmingham, UK Birmingham, UKAPPLICATION DATA Pb/Pf-free Pb-free Pb-free HAPs, g/L VOC, g/L (MINUSWATER) CURE 20 min/149 C. 20 min/175 C. 20 min/175 C. FILM PROPERTIESCOLOR Clear (+dyed) Black Black THICKNESS, μm 10-35 10-35 PENCILHARDNESS 4H BATH CHARACTERISTICS SOLIDS, % wt. 7.0 (6.5-8.0) 10-12  9-11pH (25 C.) 5.5-5.9 7-9 4.3 CONDUCTIVITY (25 C.) μS 450-600 500-800400-800 P/B RATIO OPERATION TEMP., C. 27-32 23-28 23-28 TIME, sec 60-120 ANODE SS316 316SS 316SS VOLTS 40, max  50-150

In another example, the dielectric layer can be formed electrolytically.This process is similar to electrophoretic deposition, except that thethickness of the deposited layer is not limited by proximity to theconductive or semiconductive surface from which it is formed. In thisway, an electrolytically deposited dielectric layer can be formed to athickness that is selected based on requirements, and processing time isa factor in the thickness achieved.

The dielectric layer 138 formed in this manner can conform to contoursof the interior surfaces 121, 123 of the first and second openings.

After forming the dielectric layer 138, a conductive layer 114A (FIG.11) can be formed within the openings 111, 113, which, when formed overa conformal dielectric layer 138, also can conform to contours of theinterior surfaces 121, 123 of the first and second openings. Thedeposition of an additional dielectric layer 150 and the forming of ametal layer 114B overlying the dielectric layer 150 completes aconductive element 114 exposed at an outwardly-facing surface of thepackaging layer. The conductive element extends within the first andsecond openings 111, 113 and is electrically coupled to the conductivepad 106. A plurality of such conductive elements 114 can besimultaneously formed within respective openings in the packaging layer,the conductive elements electrically coupled to respective conductivepads 106 of the wafer 200.

Thereafter, as seen in FIG. 12, a temporary carrier 180 or handle wafercan be attached to the exposed surface of the packaging layer 110overlying exposed contacts 114B of the conductive elements 114. Thecarrier 180 can be attached, for example, using an adhesive 182 whichcan be removed after subsequent processing as described below.

As further shown in FIG. 13, a thickness of the wafer 200 can be reducedto a value which may be a final thickness 112 of the wafer. Grinding,lapping or polishing may be used to reduce the wafer thickness. In aparticular embodiment, the reduced thickness may range from 0.5 micronsto only a few microns. In one possible implementation, the finalthickness 112 of the wafer 200 can be controlled by the presence of adielectric layer 184 (FIG. 12) buried within the wafer 200 whichseparates an upper portion 186 of the wafer adjacent the front surface,and having thickness 112, from a lower portion 188 opposite therefrom.In one embodiment, the buried dielectric layer 184 can be a buried oxidelayer provided in a semiconductor-on-insulator or silicon-on-insulatorwafer structure of wafer 200 before fabricating active semiconductordevices in the wafer 200. In such case, the lower wafer portion 188 canbe monocrystalline or polycrystalline semiconductor material. Then,after reaching the fabrication stage shown in FIG. 13, the carrier 180and adhesive 182 can be removed from the structure, resulting in themicroelectronic assembly 122 shown in FIG. 2.

Alternatively, without detaching the carrier from the packaging layer110, steps can be performed to fabricate a microelectronic assemblywhich further includes a second conductive element 154 as seen in FIG.3. Specifically, as seen in FIG. 14, an opening 153 can be formed whichextends through the thickness of the semiconductor region of the wafer200. As seen in FIG. 14, the opening can be formed in a manner selectiveto dielectric layer 105 of the wafer. The dielectric layer 105 caninclude a plurality of interlevel dielectric (“ILD”) layers in whichmetal wiring is provided, one or more passivation layers overlying theILD layers, or both. Thus, the opening 153 exposes a portion of thedielectric layer 105 without extending through the dielectric layer 153.

Next, as seen in FIG. 15, the opening 153 is extended through thedielectric layer 105 to expose at least a portion of a lower surface 174of the conductive pad 106. The lower surface 174 is opposite an uppersurface 172 of the pad from which the first conductive element 114extends, as illustrated in FIG. 15. Thereafter, as seen in FIG. 16, aconformal dielectric layer 158 and then a conformal conductive layer,typically of metal or a conductive metal compound, can be formed whichextends at least partly within the opening so as to form a secondconductive element 154 including a conductive layer which iselectrically coupled to the conductive pad 106 and which typically iselectrically insulated from the wafer 200 by the dielectric layer 158.Further processing can include the forming of a dielectric layer 160overlying the conductive layer 154A, and a conductive contact 154B,typically of a metal or conductive metal compound can then be formedwhich overlies the dielectric layer 160.

Thereafter, the carrier and bonding layer 182 can be detached, resultingin a microelectronic assembly as seen in FIG. 3.

In a variation of the above-described embodiment, instead of forming aconformal conductive layer 154A on dielectric layer 158 and then formingan additional dielectric layer 160 overlying the conductive layer withinthe opening in the wafer 200 as seen in FIG. 16, a conductive layer 164(FIG. 4) can be formed so as to provide a conductive contact 164 exposedat the rear face 152 of the wafer and extending to the conductive pad160 without the additional dielectric layer 160 separating the contact164 from the conductive pad.

FIG. 17 illustrates a variation of the embodiment seen in FIG. 16, inwhich the second opening 213 within the packaging layer 110 exposesfirst and second conductive pads 206. As further seen in FIG. 17, aplurality of conductive elements 214 can be formed which extend fromrespective conductive pads 206 to surfaces overlying an outwardly-facingexposed surface 218 of the packaging layer 110. The conductive elements214 may be electrically insulated from one another by the dielectriclayer 138 extending along interior surfaces of the first and secondopenings 211, 213, and the additional dielectric layer 250 which maysubstantially or fully fill the remaining volume within the openings211, 213. As seen in FIG. 17, portions of the conductive elements 214can extend as pads or traces over the additional dielectric layer 250within opening 211. However, in an alternative embodiment, theconductive elements may have portions which are only exposed atlocations beyond the opening 211 in the packaging layer.

Moreover, as in the above-described embodiments (FIG. 2, FIG. 3),optional second conductive elements 254 can extend from the conductivepads 206 and be exposed at a rear surface of the wafer or chip 102 topermit electrical interconnections to be formed to an externalcomponent.

FIG. 18 illustrates a variation of the embodiment (FIG. 17) in which thedielectric fill material is omitted when forming the second conductiveelements, such that the conductive material is continuous between theconductive pads 206 and surfaces 254A of the conductive material whichare exposed for interconnection with an external component. In aparticular embodiment, the second conductive elements 254A can have astructure as described above with reference to FIG. 5 in which a bondmetal 168 is joined to a conductive layer 166 within the opening and isexposed at a surface 152 of the microelectronic assembly.

FIG. 19 illustrates a further variation in which a plurality of secondopenings 313A, 313B extend from a particular first opening 311 in thepackaging layer 110. The second openings can be formed by laser drillingor other substantially vertical patterning method, e.g., a reactive ionetch (“RIE”), for example, after which dielectric layers 328 are formedto line interior surfaces of the second openings. The conductiveelements 314A, 314B may substantially or fully fill the volume remainingwithin the second openings 313A, 313B after forming the dielectriclayers 328. As further seen in FIG. 19, the conductive elements 314A,314B may contact edges of the conductive pads 306 exposed at the surfaceof the wafer 200. The second conductive elements 354 which are exposedat a rear surface of the wafer can overlie a dielectric layer 360 withinthe opening, or the second conductive elements 356 can have a structureas seen in FIG. 20 which need not include a dielectric layer between theconductive pads and exposed surfaces of the conductive elements.

FIG. 21 illustrates a microelectronic assembly according to anotherembodiment of the invention in which a conductive element 414 having acontact pad 416 exposed at an exterior surface 418 of packaging layer410 has a reentrant profile. Stated another way, the conductive element414 can have a shape which varies between a relatively large width 420adjacent a conductive pad 406 of wafer 401 and a smaller width 421adjacent an exposed surface 418 of the packaging layer. As in the aboveembodiment (e.g., FIGS. 1, 3), the packaging layer can consistessentially of a semiconductor material, with a dielectric layer 416disposed between an interior surface of an opening 411 therein and theconductive element 414. As further seen in FIG. 21, a second conductiveelement 454 exposed at an exterior surface of wafer 401 can extendthrough the conductive pad 406 in a direction of a thickness 408 of thepad 406. In one embodiment, as seen in FIG. 21, the second conductiveelement 454 can have a connecting portion 412 which electricallycontacts the first conductive element 414 at a height of the assemblythat is between adjacent surfaces of the wafer 401 and packaging layer410.

A process capable of forming the microelectronic assembly (FIG. 21) willnow be described. In an initial stage of fabrication (FIGS. 22-23), anopening 411 is formed which extends from a major surface of a packaginglayer 410 such as a semiconductor wafer towards a second major surface423 of the packaging layer opposite therefrom. Thereafter, as seen inFIG. 24, a dielectric layer can be formed which lines an interiorsurface of the opening and overlies major surface 403. Thereafter, ametal layer or conductive compound of a metal or both can be depositedtherein to fill the opening and form a first conductive element 430. Aplurality of such conductive elements 430 can be formed simultaneouslywhich extend from surface 403 of the wafer toward surface 423.

Thereafter, as illustrated in FIG. 25, the packaging layer 410 can bebonded to a device wafer 400 which has active semiconductor devicestherein and a plurality of conductive pads 406 exposed at a front face404 thereof. The conductive elements 430 of the packaging layer 410 canbe mated with corresponding conductive pads 406 of the device wafer suchthat the conductive elements 430 at least partially overlie therespective conductive pads 406.

Subsequently, as illustrated in FIG. 26, a thickness of the device wafer400 can be reduced to a thickness 416, such as described above relativeto FIG. 2 to provide a thinned wafer 401. Then, as seen in FIG. 27, anopening 453 can be formed which extends through a semiconductor regionof the wafer 401. For example, an etching process can be used which isperformed selectively with respect to a dielectric layer (not shown),e.g., a series of ILD layers and a passivation layer which may underliea lower surface 406A of the conductive pad.

Next, as illustrated in FIG. 28, a further opening can be formed whichextends through the dielectric layer (not shown), the conductive pad 406and a bonding layer 405 between the thinned wafer 401 and the packaginglayer 410. Then, as illustrated in FIG. 29, a dielectric layer 452 isformed within the opening, such as by an electrolytic technique asdescribed in the foregoing. The second conductive element 454 can thenbe formed in contact with the first conductive element 430. A portion ofthe second conductive element 454 may overlie the rear surface 452 ofthe thinned wafer 401, with the dielectric layer 452 disposed betweenthe semiconductor region and the second conductive element 454.

As seen in FIG. 30, a temporary support wafer or carrier 440 can bebonded to the rear surface 453 of the wafer 401 using a temporaryadhesive 418. Thereafter, as seen in FIG. 31, a thickness of thepackaging layer 410 can be reduced, e.g., by grinding, lapping orpolishing, until at least some of the first conductive elements 430 areat least partially exposed at an exposed surface 411 of the packaginglayer 410. Then, an additional dielectric layer 434 and a conductive pad432 (FIG. 32) can be optionally formed atop the dielectric layer 434 andin contact with the first conductive element to provide a structure asillustrated in FIG. 32. Subsequently, the temporary carrier 440 can bedetached from the device wafer 401 to provide a completedmicroelectronic assembly as seen, for example, in FIG. 21.

Referring now to FIG. 33, in a variation of the above-describedfabrication method (FIGS. 21-32), a wet etch step or other etch step canbe performed in conjunction with the processing shown in FIG. 28. Thewet etch step can be performed in a manner which does not attackmaterials which are exposed at exposed surfaces of the first conductiveelements 430 and the conductive pads 406. In such case, the wet etchstep can produce undercut regions 442 between the first conductiveelements 430 and conductive pads 406 adjacent thereto.

Subsequently, as shown in FIG. 34, the dielectric layer 452 can then beformed and a region 464 of metal or a conductive compound of a metal canbe deposited onto the first conductive element 430, deposited within theundercut regions and onto surfaces of the conductive pads 406 and thedielectric layer 452 to produce a structure as seen in FIG. 34. With themetal regions 464 of the second conductive elements deposited within theundercut regions 442, the metal regions may have greater surface area incontact with the conductive pads 406 of the wafer 401. In this way, itmay be possible to achieve improved process tolerances or improvedreliability in the final structural connection between the conductivepads 406 and the first and second conductive elements. Thereafter,further processing as described above (FIGS. 31-32) can be performed toproduce the microelectronic assembly as seen in FIG. 35.

In another variation, when thinning the packaging layer 410 as seen inFIG. 36, the thickness 460 of the packaging layer can be reduced evenfurther, such that the remaining height 462 of the packaging layer fromthe device wafer front surface 404 is below a maximum height 464 of thefirst conductive elements 430 from the device wafer front surface.Thereafter, portions of the dielectric layer 428 which are exposed abovethe reduced height 462 of the packaging layer can be removed from thestructure to produce a structure as represented in FIG. 37 in which aplurality of conductive posts 470 have substantial portions projectingabove an exposed surface 421 of the packaging layer. Moreover, when theposts 470 are formed by electroplating or depositing a metal which hassubstantially rigidity at normal chip operating temperature ranges,e.g., such as copper, nickel, aluminum, etc., refractory metals, e.g.,tungsten, titanium, and the like, the posts 470 can be substantiallyrigid.

FIG. 38 further illustrates possible further interconnection arrangementof the microelectronic assembly resulting from such variation (FIGS.36-37). As seen in FIG. 38, the substantially rigid conductive posts 470of the microelectronic assembly 480 can be mounted via solder-masses 482to corresponding contacts 484 on a dielectric element 426 to form amicroelectronic package 490. In turn, the contacts 484 can beelectrically connected with joining units 486, e.g., solder balls orother masses of a bond metal such as tin or indium or a combinationthereof which are exposed at a lower surface 488 of the dielectricelement 426. As further shown in FIG. 38, the joining units 486 can beused to join the package 490 to corresponding contacts 492 exposed at asurface 493 of a circuit panel 494.

FIG. 39 illustrates a microelectronic assembly 590 according to afurther variation, showing that not all of the conductive pads of awafer 501, particularly conductive pad 506A, need to be connected with afirst conductive element 530. To form the assembly 590, the firstconductive element at a position corresponding to pad 506A can beomitted when forming the first conductive elements of the packaginglayer 510. After bonding the device wafer with the packaging layer andforming openings 453 overlying the conductive pads as described abovewith respect to FIG. 27, a blocking layer such as a resist pattern canbe used to control the locations where conductive layers extend throughthe conductive pads 506B, and other locations wherein the conductive pad506A should not be punctured.

FIG. 40 illustrates yet another variation in which an electricallyconductive redistribution layer (“RDL”) 640 can be formed overlying asurface of a dielectric layer disposed on the packaging layer 610. TheRDL can include electrically conductive traces 642 and pads 644. As seenin FIG. 40, traces 642 can electrically connect one or more of the firstconductive elements 630 with one or more of the electrically conductivepads 644, which in turn are connected to one or more of the secondconductive elements 654A. In a particular embodiment, as illustrated inFIG. 40, some of the second conductive elements 654B may not beelectrically connected with a first conductive element of the assembly690. As further seen in FIG. 40, some of the second conductive elementscan be electrically connected to a source of reference potential such asground through an electrically conductive metal layer 656 in contacttherewith. In a particular embodiment, the metal layer 656 can be ajoining layer of solder, tin, indium or a combination thereof. Inaddition, in one embodiment, the metal layer 656 can be used toelectrically connect and join one or more of the second conductiveelements with a metal ground plane which can also function as athermally conductive heat spreader for the microelectronic assembly 690.A dielectric layer 658 can electrically insulate a second conductiveelement 654A from the joining layer 656 of the assembly 690.

Microelectronic assemblies according to other variations of theabove-described embodiment (FIGS. 21-32) can be as further seen in FIGS.41 and 42 in which two or more first conductive elements 714A, 714Bextend along interior surfaces of an opening 711 in a packaging layer710, the first conductive elements including portions 716A, 716Bextending through separate openings between the first opening 711 and anexposed surface 718 of a dielectric layer of the assembly 790. The firstconductive elements 714A, 714B may include respective electricallyconductive pads 720A, 720B exposed at the surface 718 of the dielectriclayer 718, which as shown in FIGS. 41 and 42 may overlie the dielectriclayer 718. The second conductive elements 754A, 754B of the assemblyshown in FIG. 41 vary from the second conductive elements 755A, 755Bshown in FIG. 42 in the same way as the second conductive elements inthe embodiments described above with respect to FIGS. 17 and 18,specifically, that exposed contact surfaces of the pads 754A, 754B (FIG.41) overlie a dielectric layer above the respective pads 706A, 706B towhich they are connected, whereas in the assembly of FIG. 42, they donot.

FIG. 43 illustrates a further variation in which a plurality of firstconductive elements 814A, 814B extend along interior surfaces of astaged opening in the packaging layer 810 from connections to conductivepads 806A, 806B of the wafer and include exposed conductive pads 832 onthe packaging layer. In this case, the staged opening includes a firstopening 811 extending from a first major surface 812 of the packaginglayer 810 adjacent the device wafer 801, and a second opening 813extending from the first opening 811 at least to a second major surface816 of the packaging layer 810 remote from the first major surface. Thefirst and second openings can have surfaces 821, 823 which extend indifferent directions defining a vertex 826 where the surfaces 821, 823meet. A dielectric material 850 typically covers the first conductiveelements 814A, 814B. Interconnection of the first conductive elements814A, 814B to the conductive pads 806A, 806B can be as described abovewith reference to FIG. 41.

FIG. 44 illustrates a variation of the embodiment (FIG. 43) similar tothe above-described embodiment (FIG. 42) in which the second conductiveelements 855A, 855B have contact surfaces which are not separated fromthe conductive pads 806A, 806B by a dielectric material.

FIG. 45 illustrates a microelectronic assembly 990 according to avariation of the embodiment described above with respect to FIG. 2. Inthis variation, the first electrically conductive elements 914 extendingfrom conductive pads 906 of the device wafer 901 do not conform tocontours of interior surfaces of the openings 911, 913, which togetherextend through the packaging layer 910 in a direction 922 of a thicknessof the packaging layer. As seen in FIG. 45, the first conductiveelements can have portions which are cylindrical or frustoconical inshape extending in a direction of a thickness of the packaging layer tocontact upper surfaces 907 of conductive pads 906.

A dielectric region 928 is provided within the openings 911, 913 whichtypically contacts upper surfaces 907 of the conductive pads 906,wherein the first conductive elements extend through the dielectricregion. A portion 928A of the dielectric region can overlie anoutwardly-facing surface 926 of the packaging layer. Electricallyconductive pads 916 exposed at a surface of the dielectric region 928may be provided as portions of the conductive element 914, and can bedisposed atop the dielectric region 928. Alternatively, the electricallyconductive pads 916 can be omitted.

The microelectronic assembly 990 can be fabricated by processing similarto that described above with reference to FIGS. 6 through 13, exceptthat the dielectric regions 928 are formed by depositing a dielectricmaterial to fill the openings 911, 913. Such dielectric regions 928typically consist essentially of a polymeric material, which may becompliant, as determined by a combination of the material's modulus ofelasticity and the thickness of the dielectric region. After forming thedielectric regions, apertures can be formed extending through thedielectric regions 928 to expose at least portions of the conductivepads 906. The apertures can have at least one of cylindrical orfrustoconical shape, among others. An electrically conductive layer orfilling, e.g., a metal or conductive compound of a metal, can then beprovided in the apertures to form vertically extending portions of thefirst conductive elements 914. Thereafter, exposed conductive padportions 916 can then be formed above a surface of the dielectric layer928.

FIG. 46 illustrates a variation of the embodiment shown in FIG. 45 inwhich second electrically conductive elements 954, similar to the secondconductive element 164 described above relative to FIG. 4, are exposedat an exposed surface of the device wafer 901 and electrically contactthe conductive pads 906.

FIG. 47 illustrates a variation of the embodiment shown in FIG. 46 inwhich second dielectric regions 938 overlie lower surfaces 909 of theconductive pads 906 which are opposite the upper surfaces 907. In thiscase, vertically extending cylindrical or frustoconical portions 914A ofthe first conductive elements may extend through the conductive pads 906to electrically conductive pad portions 918 exposed at theoutwardly-facing rear surface 950 of the device wafer 901. In this case,the vertically extending portions 914A may not conform to contours ofinterior surfaces of any of the openings 911, 913 and 915 in thepackaging layer and the device wafer, respectively. Fabrication of themicroelectronic assembly (FIG. 47) varies in that the dielectric regions928, 938 are formed in the openings 911, 911, 915, after whichcylindrical or frustoconical openings are formed extending through theconductive pads 906 and the dielectric regions 928, 938, such as bylaser ablation, micro-abrasive particle stream (e.g., “sandblasting”),or other technique. Thereafter, in one embodiment, conductive pads 916,918 can be formed which can be exposed at opposite faces of themicroelectronic assembly.

FIG. 48 illustrates a microelectronic assembly 1090 according to avariation of the embodiment shown in FIG. 47 in which second conductiveelements 1054 can extend through thicknesses of the conductive pads1006. In one embodiment, the fabrication of the microelectronic assembly1090 can include forming openings 1015 in the device wafer 1001 whichincludes patterning the conductive pads 1006, e.g., by etching, laserablation, micro-abrasive particle streaming, etc. in a direction from alower surface 1050 of the device wafer 1001. Such patterning can belimited by the presence of the bonding layer 1008 between the devicewafer and packaging layer 1010. After forming dielectric layers 1038 inthe openings 1015. The second conductive elements 1054 then can beformed extending within the openings 1015.

FIG. 49 illustrates a further variation in which the first and secondelectrically conductive elements 1114, 1154 meet at locations within thethickness of the packaging layer 1110. In this case, the secondconductive elements 1154 extend through the electrically conductive pads1106 of the device wafer 1101.

As further seen in FIG. 50, in a variation of the embodiment (FIG. 49),the second conductive elements 1254 may include portions 1254B whichconform to contours of interior surfaces of the openings 1215 in thedevice wafer 1201. However, as seen in FIG. 50, portions 1254A whichextend within the thickness of the packaging layer 1210 may not conformto contours of interior surfaces of the openings 1213 into whichportions 1254A extend.

FIG. 51 illustrates a microelectronic assembly according to a variationof the embodiment described above (FIG. 43) in which first and secondconductive pads 1306A, 1306B of a microelectronic element 1301 are atleast substantially exposed within a relatively wide through opening1313 in the first element 1310. Separate conductive elements 1314A,1314B to the pads extend along interior surfaces of the opening and canbe exposed within openings 1316A, 1316B in a dielectric layer 1318 whichoverlies a major surface 1320 of the first element.

FIG. 52 illustrates a stage in a method of conductive elements in yetanother variation of the above-described embodiment (FIG. 51). In thiscase, opening 1313 is formed extending through a thickness of the firstelement and then is filled with a dielectric material 1318, such as byone of the techniques described above. Then, as seen in FIG. 53,conductive elements 1314 similar to those described above (FIG. 45) canbe formed extending through the dielectric region 1318 to contact theconductive pads 1306A, 1306B. Optionally, electrically conductive pads1315A, 1315B can be provided atop the conductive elements 1314A, 1314B,these typically being exposed for interconnection with an externalcomponent.

Turning now to FIG. 54 et seq., a method will now be described forfabricating a microelectronic assembly according to a variation of theabove-described embodiment (FIGS. 22-34). As seen in FIG. 54, an opening1413 is formed extending from a major surface of a first element 1410(e.g., an element having a CTE of less than 10 ppm/° C.). In oneexample, the first element may consist essentially of semiconductor ordielectric material. The first element 1410 then is filled with adielectric material 1418, which can form a layer overlying a majorsurface 1420 of the first element. Referring to FIG. 55, the firstelement 1410 then is assembled, e.g., bonded with a microelectronicelement 1402 having electrically conductive pads 1406 thereon, one ofwhich is illustrated in FIG. 55.

Then, in like manner as described above (FIG. 26), a reduced thickness1411 of the microelectronic element can be achieved by grinding, lappingor polishing, or combination thereof, as described above, as seen inFIG. 56. Then, the structure can be assembled with a carrier 1430 (FIG.57), and a thickness of the first element 1410 above the opening 1413can be reduced until the opening is exposed at a surface 1417 of thefirst element (FIG. 58).

A dielectric layer 1419 may then be formed atop the surface 1417, asseen in FIG. 59. Thereafter, an opening 1432 can be formed which extendsthrough the dielectric material both above the surface 1417 (FIG. 60)and within the opening 1416 to expose a portion of the conductive pad1406. Typically, a portion of the upper surface 1409 (i.e., the surfacefacing away from microelectronic element 1402) is exposed within opening1432. However, in some cases, the opening 1432 can extend through thepad 1406 such that interior surfaces of an opening in the pad 1406 canbe exposed.

FIG. 61 illustrates a subsequent stage in which a metal has beendeposited in one or more steps to form an electrically conductiveelement 1414 and an electrically conductive pad 1420 overlying theconductive element 1414. The pad 1420 may or may not overlie a surfaceof the first element 1417 and dielectric layer 1419. FIG. 61 illustratesan example in which the conductive element is non-hollow, i.e., filledthroughout with a metal. After reaching the stage shown in FIG. 61, thecarrier can be removed from the microelectronic element 1402, resultingin a structure as seen in FIG. 62.

FIG. 63 illustrates a further variation of the embodiment seen in FIG.62 in which the conductive element 1424 can be a hollow structure, suchas formed by depositing a metal to line an interior surface of theopening 1432. The conductive element in either the FIG. 62 or FIG. 63variation will typically be in form of an annular structure whichconforms to a contour of the opening 1432 in the dielectric material,but which does not conform to the opening 1413 that was first made inthe first element 1410. A conductive pad 1430 can overlie the conductiveelement 1424 and can extend in one or more lateral directions 1440 awaytherefrom, lateral being a direction in which the surface 1417 of thefirst element extends.

The structure and fabrication of the microelectronic assemblies andincorporation thereof into higher-level assemblies can includestructure, and fabrication steps which are described in one or more ofthe following commonly owned co-pending United States applications eachfiled on Dec. 2, 2010: U.S. Provisional Application No. 61/419,037; andU.S. Nonprovisional application Ser. No. 12/958,866; and the followingU.S. applications each filed Jul. 23, 2010: application Ser. Nos.12/842,717; 12/842,651; 12/842,612; 12/842,669; 12/842,692; and12/842,587; the disclosures of all such applications being incorporatedby reference herein. The structures discussed above provideextraordinary three-dimensional interconnection capabilities. Thesecapabilities can be used with chips of any type. Merely by way ofexample, the following combinations of chips can be included instructures as discussed above: (i) a processor and memory used with theprocessor; (ii) plural memory chips of the same type; (iii) pluralmemory chips of diverse types, such as DRAM and SRAM; (iv) an imagesensor and an image processor used to process the image from the sensor;(v) an application-specific integrated circuit (“ASIC”) and memory. Thestructures discussed above can be utilized in construction of diverseelectronic systems. For example, a system 1500 in accordance with afurther embodiment of the invention includes a structure 1506 asdescribed above in conjunction with other electronic components 1508 and1510. In the example depicted, component 1508 is a semiconductor chipwhereas component 1510 is a display screen, but any other components canbe used. Of course, although only two additional components are depictedin FIG. 64 for clarity of illustration, the system may include anynumber of such components. The structure 1506 as described above may be,for example, a microelectronic assembly 100 as discussed above inconnection with FIG. 1, or any of FIGS. 2-63. In a further variant, bothmay be provided, and any number of such structures may be used.Structure 1506 and components 1508 and 1510 are mounted in a commonhousing 1501, schematically depicted in broken lines, and areelectrically interconnected with one another as necessary to form thedesired circuit. In the exemplary system shown, the system includes acircuit panel 1502 such as a flexible printed circuit board, and thecircuit panel includes numerous conductors 1504, of which only one isdepicted in FIG. 64, interconnecting the components with one another.However, this is merely exemplary; any suitable structure for makingelectrical connections can be used. The housing 1501 is depicted as aportable housing of the type usable, for example, in a cellulartelephone or personal digital assistant, and screen 1510 is exposed atthe surface of the housing. Where structure 1506 includes alight-sensitive element such as an imaging chip, a lens 1511 or otheroptical device also may be provided for routing light to the structure.Again, the simplified system shown in FIG. 64 is merely exemplary; othersystems, including systems commonly regarded as fixed structures, suchas desktop computers, routers and the like can be made using thestructures discussed above.

As these and other variations and combinations of the features discussedabove can be utilized without departing from the present invention, theforegoing description of the preferred embodiments should be taken byway of illustration rather than by way of limitation of the invention.

While the above description makes reference to illustrative embodimentsfor particular applications, it should be understood that the claimedinvention is not limited thereto. Those having ordinary skill in the artand access to the teachings provided herein will recognize additionalmodifications, applications, and embodiments within the scope of theappended claims.

1. A microelectronic assembly, comprising: a first element consistingessentially of at least one of semiconductor or inorganic dielectricmaterial; a microelectronic element attached to the first element suchthat a surface of the first element faces a major surface of themicroelectronic element, the microelectronic element having a pluralityof conductive pads exposed at the major surface, the microelectronicelement having active semiconductor devices therein; a first openingextending from an exposed surface of the first element towards thesurface thereof which faces the microelectronic element, and a secondopening extending from the first opening to a first one of theconductive pads, wherein where the first and second openings meet,interior surfaces of the first and second openings extend at differentangles relative to the major surface of the microelectronic element; anda conductive element extending within the first and second openings andcontacting the at least one conductive pad.
 2. A microelectronicassembly, comprising: a first element consisting essentially of at leastone of semiconductor or inorganic dielectric material; a microelectronicelement attached to the first element such that a surface of the firstelement faces a major surface of the microelectronic element, themicroelectronic element having a plurality of conductive pads exposed atthe major surface, the microelectronic element having activesemiconductor devices therein; a first opening extending from an exposedsurface of the first element towards the surface thereof which faces themicroelectronic element, and a second opening extending from the firstopening through a first one of the conductive pads, wherein where thefirst and second openings meet, interior surfaces of the first andsecond openings extend at different angles relative to the major surfaceof the microelectronic element; and a conductive element extendingwithin the first and second openings and contacting the at least oneconductive pad.
 3. A microelectronic assembly as claimed in claim 1 or2, wherein the conductive element conforms to a contour of an interiorsurface of at least one of the first and second openings.
 4. Amicroelectronic assembly as claimed in claim 1 or 2, wherein theconductive element has a shape determined independently from a contourof an interior surface of at least one of the first and second openings.5. A microelectronic assembly as claimed in claim 1 or 2, wherein theconductive element has at least one of cylindrical or frusto-conicalshape.
 6. A microelectronic assembly as claimed in claim 1 or 2, whereinthe first element is a carrier which does not have active semiconductordevices therein.
 7. A microelectronic assembly as claimed in claim 5,wherein the first element further includes at least one passive circuitelement therein.
 8. A microelectronic assembly as claimed in claim 5,wherein the at least one passive circuit element includes at least oneselected from the group consisting of an inductor, a resistor, or acapacitor.
 9. A microelectronic assembly as claimed in claim 5, whereinthe carrier mechanically supports the microelectronic element.
 10. Amicroelectronic assembly as claimed in claim 1 or 2, wherein the firstelement has a first thickness and the microelectronic element has asecond thickness less than or equal to the first thickness.
 11. Amicroelectronic assembly as claimed in claim 1 or 2, wherein the majorsurface of the microelectronic element is a front surface thereof, andthe microelectronic element has a rear surface opposite the frontsurface, and an opening extending from a rear surface and exposing atleast a portion of at least one of the conductive pads, and a secondconductive element extends within the opening in the microelectronicelement and being electrically connected with the conductive pad.
 12. Amicroelectronic assembly as claimed in claim 11, wherein themicroelectronic element includes a plurality of the openings, and themicroelectronic assembly includes a plurality of the second conductiveelements extending within the second openings and electrically connectedwith the conductive pads.
 13. A microelectronic assembly as claimed inclaim 12, wherein the second conductive elements are electricallyconnected with respective ones of the conductive pads.
 14. Amicroelectronic assembly, comprising: a first element consistingessentially of at least one of semiconductor or inorganic dielectricmaterial; a microelectronic element attached to the first element suchthat a surface of the first element faces a major surface of themicroelectronic element, the microelectronic element having a pluralityof conductive pads having upper surfaces exposed at the major surfaceand lower surfaces opposite the upper surfaces, the microelectronicelement having active semiconductor devices therein; a first conductiveelement extending within a first opening in the first element andcontacting the upper surface of at least one of the conductive pads; anda second conductive element extending through a second opening in themicroelectronic element and contacting the at least one conductive pad,the first and second conductive elements being exposed at opposite facesof the microelectronic assembly for electrically conductiveinterconnection with at least one component external to themicroelectronic assembly.
 15. A microelectronic assembly as claimed inclaim 14, wherein the interior surfaces of the first and second openingsextend away from the respective upper and lower surfaces of the at leastone conductive pad at first and second different angles.
 16. Amicroelectronic assembly as claimed in claim 14, wherein themicroelectronic element includes a plurality of the second openings, andthe microelectronic assembly includes a plurality of the secondconductive elements extending within the second openings andelectrically connected with the conductive pads, the second conductiveelements being electrically connected with respective first conductiveelements extending within the first opening.
 17. A microelectronicassembly as claimed in claim 14, wherein the first element furtherincludes at least one passive circuit element therein.
 18. Amicroelectronic assembly as claimed in claim 14, wherein the opening inthe first element includes a third opening extending from a rear surfaceof the first element towards the front surface, and further includes afourth opening extending from the third opening and exposing at least aportion of the upper surface of at least one of the conductive pads, thefirst conductive element extending at least within the third opening andthrough the fourth opening to contact the upper surface of the at leastone conductive pad.
 19. A microelectronic assembly as claimed in claim 1or 2, wherein the conductive element has a shape determinedindependently from a contour of an interior surface of at least one ofthe first and second openings.
 20. A microelectronic assembly as claimedin claim 1 or 2, wherein the conductive element has at least one ofcylindrical or frusto-conical shape.
 21. A microelectronic assembly asclaimed in claim 20, wherein the conductive element tapers uniformlyfrom a first width adjacent the exposed surface of the first element toa second width adjacent the conductive pad of the microelectronicelement.
 22. A microelectronic assembly as claimed in claim 1 or 2,wherein the conductive element conforms to a contour of an interiorsurface of at least one of the first and second openings.
 23. Amicroelectronic assembly as claimed in claim 1 or 2, wherein a portionof the conductive element within the second opening conforms to acontour of an interior surface of the second opening.
 24. Amicroelectronic assembly as claimed in claim 23, wherein a portion ofthe conductive element extending within the first and second openingshas at least one of cylindrical or frusto-conical shape.
 25. Amicroelectronic assembly as claimed in claim 20, wherein a first portionof the conductive element tapers uniformly from a first width adjacentthe exposed surface of the first element to a second width at a firstlocation within the second opening, and a second portion of theconductive element tapers uniformly from a third width adjacent the rearsurface of the microelectronic element to a fourth width at the firstlocation.
 26. A microelectronic assembly as claimed in claim 14, whereinthe second opening in the microelectronic element extends from the rearsurface of the microelectronic element through the conductive pad, andthe second conductive element extends through the conductive pad and iselectrically coupled to the first conductive element at a locationwithin the first opening.
 27. A microelectronic assembly as claimed inclaim 26, wherein the first conductive element conforms to a contour ofthe second opening in the microelectronic element.
 28. A microelectronicassembly as claimed in claim 26, wherein the first conductive elementhas a contour independent from a contour of the second opening in themicroelectronic element.
 29. A system comprising a structure accordingto claim 1, 2 or 14 and one or more other electronic componentselectrically connected to the structure.
 30. A system as claimed inclaim 29 further comprising a housing, said structure and said otherelectronic components being mounted to said housing.
 31. A method offorming a microelectronic assembly, comprising: (a) attaching a firstelement consisting essentially of at least one of semiconductor orinorganic dielectric material with a microelectronic element such that afirst surface of the first element faces a major surface of themicroelectronic element, the microelectronic element having at least oneelectrically conductive pad having an upper surface exposed at the majorsurface, the microelectronic element having active semiconductor devicesadjacent the major surface; (b) then forming a first conductive elementextending through the first element and contacting the upper surface ofthe at least one conductive pad; and (c) before or after step (b),forming a second conductive element extending through themicroelectronic element, the second conductive element contacting atleast one of the first conductive pad or a second conductive pad at themajor surface.
 32. The method as claimed in claim 31, wherein the firstand second conductive elements are exposed at opposite faces of themicroelectronic assembly.
 33. A method as claimed in claim 31, whereinthe microelectronic element includes a plurality of chips attachedtogether at dicing lines, the method further comprising severing themicroelectronic assembly along the dicing lanes into individual units,each unit including at least one of the plurality of chips.
 34. A methodas claimed in claim 33, wherein the first element is a carrier whichdoes not have active semiconductor devices therein.
 35. A method asclaimed in claim 34, wherein the first element further includes at leastone passive device therein.
 36. A method as claimed in claim 34, whereinthe carrier mechanically supports the microelectronic element.
 37. Themethod as claimed in claim 32, wherein the step of forming the firstconductive element includes forming the opening extending through thethickness of the first element after the step of attaching, and thendepositing a metal layer at least within the opening in the firstelement, the metal layer contacting the upper surface of the at leastone conductive pad exposed within the opening.
 38. The method as claimedin claim 31, wherein the step of forming the second conductive elementincludes depositing a second metal layer at least within the secondopening, the second metal layer contacting the lower surface of the atleast one conductive pad exposed within the opening in themicroelectronic element.
 39. A method of forming a microelectronicassembly, comprising: (a) attaching a first element consistingessentially of at least one of semiconductor or inorganic dielectricmaterial with a microelectronic element such that a first surface of thefirst element faces a major surface of the microelectronic element, themicroelectronic element having a plurality of electrically conductivepads having upper surfaces exposed at the major surface, themicroelectronic element having active semiconductor devices adjacent themajor surface; (b) then forming a first conductive element extendingthrough the first element and contacting the upper surface of at leastone conductive pad; and (c) before or after step (b), doing at least oneof thinning the microelectronic element from the rear surface thereof orforming an opening in the microelectronic element extending from therear surface, such that a second conductive element within themicroelectronic element becomes exposed at the rear surface.
 40. Themethod as claimed in claim 39, wherein step (c) includes thinning themicroelectronic element.
 41. The method as claimed in claim 39, whereinstep (c) includes forming an opening extending from the rear surface ofthe microelectronic element and exposing the second conductive element.42. The method as claimed in claim 40, wherein step (c) further includesafter performing the thinning, forming an opening extending from thethinned rear surface of the microelectronic element and exposing thesecond conductive element.
 43. The method as claimed in claim 31 orclaim 39, wherein the step of forming the first opening includes formingan initial opening in the first element which extends from a firstsurface of the first element towards the major surface, and then forminga further opening in the first element extending from the initial and atleast partially exposing the at least one conductive pad, wherein theinitial and the further openings have interior surfaces which intersectat an angle.
 44. The method as claimed in claim 31, wherein themicroelectronic element is a first microelectronic element, the methodfurther comprising attaching a major surface of a second microelectronicelement to a rear surface of the first microelectronic element, thenforming a third opening extending through the second microelectronicelement and at least partially exposing the second conductive element,and forming a third conductive element at least within the third openingand contacting the second conductive element.
 45. The method as claimedin claim 44, wherein the first and third conductive elements are exposedat opposite faces of the microelectronic assembly.
 46. A method offorming a microelectronic assembly, comprising: forming a firstconductive element at least within a first opening extending from afirst surface of a first element at least partially through the firstelement towards a second surface remote from the first surface, thefirst conductive element having a portion exposed at the first surface;then attaching the first element with a microelectronic element havingactive semiconductor devices therein such that the first surface of thefirst element faces a major surface of the microelectronic element, andthe first conductive element at least partly overlies a secondconductive element exposed at the major surface of the microelectronicelement; forming a third electrically conductive element extendingthrough an opening in the microelectronic element, through the at leastone second conductive element, and contacting the first conductiveelement; and further processing to provide a contact exposed at thesecond surface of the first element after the attaching step, thecontact being electrically connected with the third conductive element.47. The method as claimed in claim 46, wherein the first conductiveelement is formed such that it extends only partially through the firstelement, and the step of forming the contact includes thinning the firstelement from an exposed surface thereof until a portion of the firstconductive element is exposed at the exposed surface, the contact beingaligned with the opening in the first element.
 48. The method as claimedin claim 47, wherein the step of providing the contact includes removingmaterial of the first element from the exposed surface until a portionof the first conductive element projects above the exposed surface by adesired distance and is exposed as a post for electrical interconnectionwith a component external to the microelectronic assembly.
 49. Themethod as claimed in claim 47, further comprising forming at least onefurther opening in the first element extending from the second surfaceto the opening in the first element, wherein the step of forming thecontact includes forming a via extending through the further opening,the via electrically connected with the first conductive element. 50.The method as claimed in claim 46, wherein a portion of the firstconductive element extends along the major surface of the first element,the at least one conductive pad overlies the portion and the secondconductive element is joined to the portion.
 51. The method as claimedin claim 47, wherein the step of forming the first conductive elementincludes simultaneously forming a third conductive element at leastwithin the opening in the first element; and the step of forming thesecond conductive element includes forming a fourth conductive elementextending through the opening in the microelectronic element, through asecond one of the conductive pads, the fourth contacting the thirdconductive element.
 52. A method of forming a microelectronic assembly,comprising: (a) forming (i) a first conductive element at least withinan opening extending from a first surface at least partially through afirst element towards a second surface remote from the first surface,the first conductive element having a portion exposed at the frontsurface, and (ii) a metal redistribution layer (RDL) extending along asurface of the first element, the RDL extending away from the firstconductive element; (b) then attaching the first element with amicroelectronic element having active semiconductor devices therein suchthat the first surface of the first element faces a major surface of themicroelectronic element, and the RDL is juxtaposed with at least oneconductive pad of a plurality of conductive pads exposed at the majorsurface of the microelectronic element; (c) then forming a secondconductive element extending through an opening in the microelectronicelement, through the at least one conductive pad, and contacting theRDL; and (d) forming a contact exposed at the second surface of thefirst element after the attaching step, the contact being electricallyconnected with the first conductive element.